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타원 편광법의 원리와 응용
Principles and Applications of Ellipsometry
| 실험 내용 | Principle of ellipsometry,ellipsometry by extinction,Optical alignment,Polarization of light,Determination of fast and slow axes of a waveplate, |
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| Ellipsometric angle determination of material,Measurements of: index of a silicon substrate(n and k), | |
| Measurements in function of the incidence angle and in function of wavelength(refractive index dispersion), | |
| Highlighting the influence of a measurement error on the values of n, k and e(based on software calculation). | |
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| 실험 목적 | To use an ellipsometer in order to determine the refractive index and the thickness of various samples (silicon substrate, SiO2 monox-x-x-layer on silicon substrate, aluminum, glass). |
| A study on the effects of changes in wavelength and angle of incidence is conducted. An approach to measurement errors and their origin is also discussed. | |
| 첨부1 | 카다로그 |