분석장비

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OS 500

Laser roughness and roundness

측정 방식 Angle‐resolved scattered light (ARS) method
측정 범위 approx.: 0.05 µm
측정 속도 max. 2,000 measurements/s
응용분야 Automotive industry, Mechanical engineering industry, Medical technology
 
첨부1 카다로그  
첨부2 카다로그  


Scattered light measuring technology

Measuring surfaces with the scattered light method means speed, high accuracy and a laminar evaluation of functionally-important components.

In this process the sensor illuminates the surface, depending on the application and sensor type with a measuring spot between 0.03 to 1.8 mm diameter. The light rays deflected with varying intensity according to the surface roughness, so that so that scattered light distributions that vary in width occur. In this process this distribution curve is the basic information for roughness, form and gloss.

 

Roughness measurement

Metrology 1

For the prescribed production procedure the scattered light characteristic value correlates to Rz, Ra

Form measurement

Metrology 2

Measuring the macroform angle enables calculation of the form deviation

 

 

 

 

 

 

 

 

 

 

Measured variables

The scattered light sensor detects roughness with the characteristic value Aq, which is calculated from the distribution curve with the aid of variance. For the prescribed manufacturing method, Aq correlates with the peak-to-valley height Ra or Rz.

The Aq value takes on a new and interesting significance when, after an initial production step (e.g. grinding or turning), surfaces are subjected to an additional smoothing procedure (finishing or spinning). Here the scattered light characteristic value Aq is even superior to the traditional percentage contact area characteristic variables (Rmr, Rk). The characteristic value M, the focal position of the scattered light distribution, is used for form measurement.

The scattered light characteristic values can be entered into design drawings in accordance with a VDA guideline (VDA 2009).

Roughness measurement

  • Single value Aq (variance of the distribution)
  • Standard deviation Aqs
  • Maximum value Aqmax

Calculations from the scattered light distribution

Variance of the scattered light distribution

Form measurement

  • Roundness PV (µm) (LSC calculation)
  • Waviness (FFT)
  • Straightness (for polished surfaces) (µm)

Calculations from equidistant measurements of the form deviation angle

Integration of the macro angles